The
DigiScope is a real-time portable spectrograph. It can be
equipped with a variety of sensors, including an optical
fiber for optical emission spectroscopy and an interferometric
sensor such as Jobin Yvon's patented laser interferometric
camera. Its Windows-based software contains state-of-the-art
algorithms
for calling endpoint in real time, and full capability
for batch analysis and off-line reprocessing.
The DigiCPM is identical to the DigiScope, except that it does not include the screen and monitor. It is intended to be interfaced directly with manufacturers' etch and deposition tools.
Application Details
Silicon etch processes are continually being optimized; endpoint detection techniques require real-time evolution in order to follow their progress. Moreover, semiconductor, optical, and III-V industries are more and more demanding of process control quality. Jobin Yvon, with its long experience in the field of process control, understands the requirements of this market very well. Today, with the DigiScope, Jobin Yvon succeeds in targeting both OEM and end-user needs.
The DigiScope is a Windows-based portable instrument with optional multi-chamber capability that has been designed to provide a powerful Optical Emission Spectroscopy (OES) system for industrial and research applications. An OEM version, the DigiCPM, has also been developed with particular attention to space minimization. Both these instruments are built on the same platform. Consequently, Jobin Yvon offers its customers the choice of several hardware configurations in order to fit their needs at the fairest price.
OES is an established and universally accepted technique for endpoint detection and plasma diagnosis. Light emitted from a plasma is characteristic of a particular process. Useful information on plasma chemical composition, reactive species, and chamber contamination can be obtained from this light and allows process control and chamber control to optimize down-time, yield, and throughput. Obviously, the level of detection depends strongly on the sensor specifications. The DigiScope and DigiCPM have state-of-the-art optics for superior imaging and spatial resolution. The wide spectral range (190 to 850 nm), high resolution (down to 1 nm), and high sensitivity (2048 pixel CCD), provide the ideal in-situ monitoring solution for today's shrinking geometries and complex multi-step processes. In addition to this high tech hardware, the DigiScope includes many functions for data acquisition, display, and processing along with advanced endpoint capabilities such as digital filtering, 3D spectral viewing, mathematical operations, communication protocols, and advanced endpoint algorithms.
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