The high precision R&D thin film measurement tool

The UVISEL Spectroscopic Phase Modulated Ellipsometer from Jobin Yvon HORIBA Group allows the accurate characterization of thickness and refractive index for single and multiple layer thin film structures. Thickness determinations from a few angstroms to tens of microns are possible for complex structures found in semiconductor, flat panel display, optical coating, polymer film and biological applications.

The UVISEL ellipsometer delivers the highest combination of measurement precision, accuracy and ease-of-use for demanding research and industrial quality control. The unique features of the instrument include a wide spectral range from 190 to 2100 nm, integrated microspot optics and turnkey software package for automatic operation. A large variety of accessories are available to match the instrument to the needs of the application.

The UVISEL ellipsometer delivers unprecedented versatility and flexibility and functionality and is recognized to be the gold standard for thin film characterization.