Key
Features
DeltaPsi2 software incorporates the most powerful ellipsometric data acquisition and analysis package for accurate thin film characterization.
- Acquisition and analysis of ellipsometric, kinetic, transmission and reflection data.
- Variable angle spectroscopic ellipsometry.
- Bibliographic reference database.
- Advanced mathematical fitting algorithms.
- (n,k) fitting.
- Bound multimodel for simultaneous analysis of multiple models.
- Bound fit for simultaneous fitting of up to 4 parameters.
The
Full Performance of Ellipsometric Analysis
DeltaPsi2 software includes a large variety of advanced modeling functions to provide the versatility and performance required for a wide range of applications.
- Complete materials library based on dispersion relations.
- Roughness or interface.
- Composition / crystallinity.
- Periodic structure.
- Graded optical constants.
- Anisotropic structure.
- Correlated layers.
- Automatic backside correction.
- Depolarization factor.
- Multiguess, multistart.
Simple
Automatic Operation to Meet Production Needs
A simple user interface has been designed to perform routine tasks very easily. A recipe procedure automates data acquisition, analysis and mapping.
The design of the software allows the user to define several acquisition routines and models in a single recipe as well as several groups of points in a single grid.
- Recipe procedure.
- Fitting procedure.
- Acceptance criteria for integrated quality control.
- Conveniently access to recipe steps and original files for processing / reprocessing.
- 2D and 3D display views.
- Autofocus and pattern recognition functions.
Unsurpassed
Flexibility and Functionality
DeltaPsi2 software provides advanced features to process ellipsometric data simply and reliably. It combines simple functionality with a powerful set of complementary tools to deliver a complete, integrated solution from the measurement to the final analysis report.
- Customizable interface.
- Data manipulation.
- Advanced features for graphic manipulation screen.
- Standard Windows® clipboard transfer.
- Import/export package function.
- Automatic reporting.
- Output description for automatic calculation of specific values after modeling.
- Online help function.
