DIGICPM
For
ease of use and convenient setup to all aspects of process
development the PlasmaScope has been designed as a portable
instrument, while the DIGICPM is a fixed system including
exactly same hardware and software platform. This integrated
version offers unique capabilities for significant gain
and efficiency of full process control regarding plasma
spectra, etching end-point detection status, plasma fault
status, etc provided by the DIGICPM. The DIGICPM system
combined with its very versatile software framework allows
an easy fab and OEM integration.
