Large Area Metrology Systems

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Location: Products >> Thin Film >> Ellipsometers >> Large Area

Large Area Metrology Platform for Display Industry

Flat panel metrology systems integrate a spectroscopic ellipsometer and DUV spectroscopic reflectometer. They allow the accurate and fast characterization of film thickness, optical constants and reflectivity of patterned as small as 10 microns and multilayer materials.

FF-1000

FF-1000
Combined Spectroscopic Ellipsometer / Reflectometer

DIGISCREEN

DIGISCREEN
Automated UV-VIS Spectroscopic Reflectometer

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