The
performance capability of the UVISEL spectroscopic phase modulated ellipsometer can be extended with the integration of the VIP DUV Spectroscopic reflectometer.
The combination of high precision ellipsometer and reflectometer measuring
at the same sample position allows characterization of features as small as
10 microns.
Applications of the UVISEL VIP include measurement of film thickness, refractive index and reflectivity of thin films and multilayer stacks with very high accuracy.
Features of the UVISEL VIP include:
- 10 µm spot size
- Spectral range: 190 – 2100 nm
- Advanced automation and fast uniformity mapping
- Integrated DeltaPsi2 software platform
- Ideal for film thickness measurement for patterned and Multilayer Materials
By the addition of a large area mapping stages of dimension 200mm, 300mm and above, and with integrated pattern recognition software the UVISEL VIP is able to characterize patterned materials found in semiconductor wafers, display devices, OLED structures and biosensors with thicknesses ranging from a few angstroms to several tens of microns.
The well proven DeltaPsi2 software package controls the complete instrument, and provides a simple interface for production, pilot plant and research applications.
The UVISEL VIP is the ideal tool for film thickness measurement for patterned and multilayer materials.
|
Characterization of thickness and optical constants from 190 to 2100 nm |
Single layer and multilayer stacks |
All types of materials: semiconductors, dielectrics, polymers, metals, glass, plastics |
Complex
material properties |
