The unique HORIBA X-ray guide tube technology lies at the heart of the XGT-5000and XGT-7000 and gives the instruments their unique features:
-
highest spatial resolution down to 10 µm
- fast elemental analysis measurement at speeds up to 50 times faster than conventional equipment
- simultaneous XRF and transmission mapped imaging
- sample analysis at atmospheric pressure
Measurement Method
The X-ray guide tube (XGT), created using original HORIBA technology, irradiates the sample with an ultra-narrow (10 µm or 100 µm) high-strength X-ray beam.
A localized vacuum is formed inside the analysis probe, making it possible to analyze the sample at normal atmospheric pressure. A sample on the XY scanning stage can be visually observed via a CCD camera image from the same axis as the X-ray beam, ensuring parallax errors are removed. The XGT-5000 measures X-ray fluorescence and transmitted X-rays from the sample while the sample is being scanned, and then uses this data to create the resulting XRF/transmission images.
Comparison of Various Types of Elemental Analyzers
The XGT-5000 combines the advantages of various types of measurement devices.
XGT |
SEM / EDX |
micro focus X-ray scope |
|
Sample Positioning Using Optical |
Yes |
Image Electron Microscope Image (Monochrome) |
No |
Maximum Analysis Area |
10 cm x 10 cm |
1 - 2 mm |
- |
Minimum Analysis Area |
f 10 µm |
0.1 - 5 µm |
- |
Measurable Elements |
Na - U |
Be - U |
- |
Sample Preprocessing |
No |
Conductivity Processing |
No |
Sample Damage |
No |
Yes |
No |
Sample Contamination |
No |
Yes |
No |
Measurement at Normal Atmospheric Pressure |
Yes |
In Vacuum |
Yes |
Acquired Image/Element Map |
Yes |
Yes |
No |
Transmitted X-ray Image |
Yes |
No |
Yes |
Optical Image |
Yes |
No |
No |
